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1 LPCVD reactor
реактор для хімічного осадження з парової фази при низькому тискуEnglish-Ukrainian dictionary of microelectronics > LPCVD reactor
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2 reactor
1) (хімічний) реактор 2) котушка індуктивності; конденсатор - batch-loaded reactor
- chemical vapor deposition reactor
- cylindrical plasma etching reactor
- cylindrical plasma reactor
- EPI epitaxial reactor
- EPI reactor
- epitaxial reactor
- etching reactor
- high-pressure reactor
- hot-well reactor
- laboratory-scale reactor
- LPCVD reactor
- LPE reactor
- MO-CVD reactor
- MOVPE reactor
- multifacet reactor
- multiwafer plasma reactor
- nitride-охide NITROX reactor
- nitride-охide reactor
- oxide reactor
- “pancake” reactor
- parallel-plate reactor
- planar plasma etching reactor
- planar plasma reactor
- plasma etching reactor
- plasma reactor
- radial-flow plasma etching reactor
- sputteringreactor
- sputterreactor
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